JPS5694037U - - Google Patents
Info
- Publication number
- JPS5694037U JPS5694037U JP17661479U JP17661479U JPS5694037U JP S5694037 U JPS5694037 U JP S5694037U JP 17661479 U JP17661479 U JP 17661479U JP 17661479 U JP17661479 U JP 17661479U JP S5694037 U JPS5694037 U JP S5694037U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17661479U JPS5694037U (en]) | 1979-12-20 | 1979-12-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17661479U JPS5694037U (en]) | 1979-12-20 | 1979-12-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5694037U true JPS5694037U (en]) | 1981-07-25 |
Family
ID=29687239
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17661479U Pending JPS5694037U (en]) | 1979-12-20 | 1979-12-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5694037U (en]) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5970333U (ja) * | 1982-10-29 | 1984-05-12 | 株式会社日立国際電気 | プラズマ化学気相生成装置 |
| JPS61193428A (ja) * | 1985-02-22 | 1986-08-27 | Toshiba Corp | 半導体気相成長装置 |
-
1979
- 1979-12-20 JP JP17661479U patent/JPS5694037U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5970333U (ja) * | 1982-10-29 | 1984-05-12 | 株式会社日立国際電気 | プラズマ化学気相生成装置 |
| JPS61193428A (ja) * | 1985-02-22 | 1986-08-27 | Toshiba Corp | 半導体気相成長装置 |